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Presentation 2008-07-10 10:55
Scalability of Vertical MOSFETs in Sub-10nm generation and its Mechanism
Yuto Norifusa, Tetsuo Endoh (Tohoku Univ.)
PDF Download Link ED2008-60 SDM2008-79 Link to ES Tech. Rep. Archives: ED2008-60 SDM2008-79
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