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All Technical Committee Conferences (Searched in: All Years)
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Search Results: Conference Papers |
Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
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Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
VLD, IPSJ-SLDM |
2014-05-29 11:30 |
Fukuoka |
Kitakyushu International Conference Center |
LELECUT Triple Patterning Lithography Layout Decomposition using Positive Semidefinite Relaxation Yukihide Kohira (Univ. of Aizu), Tomomi Matsui (Tokyo Tech), Yoko Yokoyama, Chikaaki Kodama (Toshiba), Atsushi Takahashi (Tokyo Tech), Shigeki Nojima, Satoshi Tanaka (Toshiba) VLD2014-6 |
One of the most promising techniques in the 14 nm logic node and beyond is triple patterning lithography (TPL). Recently... [more] |
VLD2014-6 pp.27-32 |
VLD |
2014-03-04 13:50 |
Okinawa |
Okinawa Seinen Kaikan |
Local Pattern Modification Method for Lithographical ECO in Double Patterning Yutaro Miyabe, Atsushi Takahashi, Tomomi Matsui (Tokyo Inst. of Tech.), Yukihide Kohira (Univ. of Aizu), Yoko Yokoyama (Toshiba) VLD2013-149 |
In advanced semiconductor manufacturing processes, even though a pattern is generated according to
a design rule, hot s... [more] |
VLD2013-149 pp.87-92 |
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