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All Technical Committee Conferences (Searched in: All Years)
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Search Results: Conference Papers |
Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
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Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
SDM |
2010-06-22 13:25 |
Tokyo |
An401・402 Inst. Indus. Sci., The Univ. of Tokyo |
The Crystalline Structures and Electrical Properties of PrAlO formed by Atomic Layer Deposition. Kazuya Furuta, Wakana Takeuchi, Mitsuo Sakashita, Hiroki Kondo, Osamu Nakatsuka, Shigeaki Zaima (Nagoya Univ.) SDM2010-40 |
[more] |
SDM2010-40 pp.39-42 |
SDM |
2009-06-19 16:20 |
Tokyo |
An401・402 Inst. Indus. Sci., The Univ. of Tokyo |
Formation of Pr Oxide by Atomic Layer Deposition Using Pr(EtCp)3. Hiroki Kondo, Kazuya Furuta, Hirotaka Matsui, Mitsuo Sakashita, Shigeaki Zaima (Nagoya Univ.) SDM2009-41 |
Formation of Pr oxide by atomic layer deposition (ALD) using Pr(EtCp)3 precursor was investigated, and ALD growth of Pr ... [more] |
SDM2009-41 pp.81-85 |
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