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Paper Abstract and Keywords
Presentation 2017-11-09 15:15
Study of ferroelectric films for the development of phase shifter in microwave and millimeter wave band -- The optimization of deposition conditions --
Hiromi Shima (NDA), Hiroshi Uchida (Sophia Univ.), Takashi Nakajima (TUS/JST PRESTO), Soichiro Okamura (TUS), Shotaro Fukuda, Toshihisa Kamei (NDA) MW2017-125 Link to ES Tech. Rep. Archives: MW2017-125
Abstract (in Japanese) (See Japanese page) 
(in English) Since the arrival of the IoT era, the development of tunable multifunctional devices in the microwave and millimeter wave bands is required. We have proposed liquid crystal loaded phase shifter in microwave band, whose phase shifter operation is based on anisotropy in dielectric permittivity for the applied electric field. In this study, we are developing the ferroelectric thin film loaded phase shifter in which the liquid crystal layer is replaced with the ferroelectric thin film. In this report, for application in the RF band, optimum deposition condition of Ba(Zr,Ti)$O_3$ film in which Zr is substituted for the B site of BaTi$O_3$ were examined from the results of structural analysis, film quality and dielectric properties. As a result, it was confirmed that sintering at a higher temperature promotes growth of crystal grains, and high dielectric permittivity and tunability properties can be obtained.
Keyword (in Japanese) (See Japanese page) 
(in English) microwave / millimeter wave / phase shifter / ferroelectric thinfilm / RF tunable device / / /  
Reference Info. IEICE Tech. Rep., vol. 117, no. 291, MW2017-125, pp. 73-77, Nov. 2017.
Paper # MW2017-125 
Date of Issue 2017-11-02 (MW) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
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All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF MW2017-125 Link to ES Tech. Rep. Archives: MW2017-125

Conference Information
Committee MW  
Conference Date 2017-11-09 - 2017-11-10 
Place (in Japanese) (See Japanese page) 
Place (in English) Miyakojima Marin Terminal Bldg. 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Microwave Technologies 
Paper Information
Registration To MW 
Conference Code 2017-11-MW 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Study of ferroelectric films for the development of phase shifter in microwave and millimeter wave band 
Sub Title (in English) The optimization of deposition conditions 
Keyword(1) microwave  
Keyword(2) millimeter wave  
Keyword(3) phase shifter  
Keyword(4) ferroelectric thinfilm  
Keyword(5) RF tunable device  
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1st Author's Name Hiromi Shima  
1st Author's Affiliation National Defense Academy (NDA)
2nd Author's Name Hiroshi Uchida  
2nd Author's Affiliation Sophia University (Sophia Univ.)
3rd Author's Name Takashi Nakajima  
3rd Author's Affiliation Tokyo University of Science/JST PRESTO (TUS/JST PRESTO)
4th Author's Name Soichiro Okamura  
4th Author's Affiliation Tokyo University of Science (TUS)
5th Author's Name Shotaro Fukuda  
5th Author's Affiliation National Defense Academy (NDA)
6th Author's Name Toshihisa Kamei  
6th Author's Affiliation National Defense Academy (NDA)
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Speaker Author-1 
Date Time 2017-11-09 15:15:00 
Presentation Time 15 minutes 
Registration for MW 
Paper # MW2017-125 
Volume (vol) vol.117 
Number (no) no.291 
Page pp.73-77 
#Pages
Date of Issue 2017-11-02 (MW) 


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