Special Issue on Micromachines and Micro Electro Mechanical Systems =================================================================== . FOREWORD ........................................................ 121 Hiroyuki FUJITA PAPERS ====== . 3-Dimensional Specific Thickness Glass Diaphragm Lens for Dynamic Focusing ........................................................ 123 Takashi KANEKO, Yutaka YAMAGATA, Takaharu IDOGAKI, Tadashi HATTORI and Toshiro HIGUCHI . Electrostatic Actuator with Electret ............................ 128 Mitsuo ICHIYA, Fumihiro KASANO, Hiromi NISHIMURA, Jacques LEWINER and Didier PERINO . Dry-Released Nickel Micromotors with Low-Friction Bearing Structure ........................................................ 132 Toshiki HIRANO, Tomotake FURUHATA and Hiroyuki FUJITA . AlGaAs/GaAs Micromachining for Monolithic Integration of Micromechanical Structures with Laser Diodes .................... 139 Yuji UENISHI, Hidenao TANAKA and Hiroo UKITA . Scanning Force Microscope Using Piezoelectric Excitation and Detection ....................................................... 146 Toshihiro ITOH, Takahiro OHASHI and Tadatomo SUGA . Temperature Compensated Piezoresistor Fabricated by High Energy Ion Implantation .................................................... 152 Takahiro NISHIMOTO, Shuichi SHOJI, Kazuyuki MINAMI and Masayoshi ESASHI . Formation of Black Membrane Using a Microfabricated Orifice ..... 157 Masao WASHIZU, Seiichi SUZUKI, Osamu KUROSAWA, Hideaki KURAHASHI and Akira KATOH . Metal Injection Molding (MIM) Processing for Micro Structures; Part 1 --Vibrational Processing to Improve the Surface Roughness of the Forming Molds-- ................................................. 162 Haruo OGAWA, Yuichiro TAKAHASHI, Jun INAHASHI and Toru SENGA . Three-Dimensional Microfabrication of Single-Crystal Silicon by Plasma Etching .................................................. 167 Tomoaki GOTO, Kouji MATSUSHITA and Katsumi HIRONO . Fast Atom Beam (FAB) Processing with Separated Masks ............ 174 Masahiro HATAKEYAMA, Katsunori ICHIKI, Tadasuke KOBATA, Masayuki NAKAO and Yotaro HATAMURA . Macro- and Micro-Tribological Properties of Polished CVD Diamond Films and Trial Processing of Diamond ........................... 180 Shojiro MIYAKE, Takanori MIYAMOTO, Reizo KANEKO and Toshiyuki MIYAZAKI Regular Section =============== PAPERS ====== [Semiconductor Materials and Devices] . Lateral Scaling Investigation on DC and RF Performances of InP/InGaAs Heterojunction Bipolar Transistors ................... 186 Hiroki NAKAJIMA, Kenji KURISHIMA, Shoji YAMAHATA, Takashi KOBAYASHI and Yutaka MATSUOKA [Microwave and Millimeter Wave Technology] . Modeling of Curved Conductor Surface in Analysis of Cavity Resonators by Spatial Network Method ............................ 193 Yukio IIDA and Masanobu MORITA LETTERS ======= [Opto-Electronics] . Vertical Cavity Surface-Emitting Laser Array for 1.3ƒÊm Range Parallel Optical Fiber Transmissions ............................ 201 Toshihiko BABA, Yukiaki YOGO, Katsumasa SUZUKI, Tomonobu KONDO, Fumio KOYAMA and Kenichi IGA =============== [Electromagnetic Theory] . Reflection and Transmission Phase Characteristics of Inductive Discontinuities of Finite Thickness in Rectangular Waveguides ... 204 Toshihiko SHIBAZAKI, Teruhiro KINOSHITA and Ryoji SHIN'YAGAITO . ABSTRACTSiIEICE Trans., Vol.J78-C-I, J78-C-II, No.2 in Japanese) ........................................................ 208